Impact of Ion Fluence on Ripple Formation Using Ar+ and Kr+ Irradiations
Keywords:
Ion beam, Ripple patterns, Rutherford backscattering spectroscopyAbstract
This study investigates the impact of altering the fluence of Ar+ and Kr+ ion irradiations on the generation of ripples on surfaces. Ar+ ions with lower mass produces ripples with longer wavelengths due to their higher penetration range compared to Kr+, but smaller roughness of the ripples is associated with the lower sputtering. The RBS-C investigation indicates that higher ion fluence results in the augmentation of the amorphous layer below the ripples. Mathematical studies validate that as time progresses, the wavelength of ripples expands and is directly related to the length at which atoms are re-deposited, which is determined by the thickness of the amorphous layer. Thus, ripple growth is controlled by solid flow velocity and the amorphous layer's thickness.
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